The E1-Vac two-dimensional material vacuum transfer system is the first vacuum transfer commercial solution in China. It is suitable for the precise point transfer of single-layer materials such as graphene, molybdenum sulfide and black phosphorus, and the preparation of multi-layer van der Waals heterojunction.
Due to the process of preparing a two-dimensional semiconductor material transistor of a multilayer heterojunction structure, it is necessary to transfer a layer of two-dimensional material to another layer of two-dimensional material. When transferring in a conventional atmospheric environment, it is inevitable that there will be a problem that a small amount of bubbles are contained in the two layers of material after the transfer; and some two-dimensional materials are affected by water and oxygen in the air, so that the performance of the material itself is degraded. . Both make device performance significantly degraded.

The E1-Vac vacuum two-dimensional material transfer system realizes the material transfer process under vacuum environment by integrating ultra-low vacuum environment, ultra-long working distance objective lens, all-electric, high-precision micro-operation module, and in-situ high-precision lifting/lowering module. To solve the two major problems of material transfer:

Avoid water and oxygen problems

Avoid forming bubbles between two layers of two-dimensional materials

Main configuration*

Vacuum chamber system The whole cavity size is 485*320*270mm, weight 80kg; bipolar rotary vane vacuum oil pump; micro precision resistance vacuum gauge; electromagnetic stop valve
Substrate carrier platform X/Y two-axis electric adjustable displacement slide table, stroke 13 mm, positioning accuracy 0.2μm; motorized rotary table around z-axis, positioning accuracy positioning accuracy 0.1°; tilting table around X-axis and Y-axis, tilting Angle ± 2 °
The substrate heating platform heating system has a maximum heating temperature of 150 ° C, a minimum temperature of 10 ° C, a heating rate of up to 2 ° C / s, a cooling rate of up to 1.5 ° C / s, a temperature rise and fall speed of 0.01 ° / s, and an oscillation deviation of less than 0.2 ° C
Slide mobile platform X/Y two-axis electric adjustable displacement slide, stroke 25mm, positioning accuracy 0.2μm accuracy; Z-axis electric lifting slide, stroke 10mm, positioning accuracy 0.2μm accuracy; manual rapid rotation sampling device
Monocular microscope zoom ratio 1:6.5, zoom range 0.7X-4.5X; 20 times long working distance objective lens, 31 mm working distance
Micro Camera 12 Megapixel USB 3.0 Ultra HD CMOS Microscope Camera; Provides Micro Camera Operation Software
Motorized microscope focusing Z-axis Z-axis electric lifting slide adjusts the focus position of the objective lens, stroke 10mm, positioning accuracy 0.2μm
Integrated control cabinet Cabinet size 600*600*500mm; including power supply, microscope LED control, backlight LED control, temperature control, vacuum switch control and host, working voltage 220V, maximum output power 500W
Computer i3 processor, 8G memory, 1T hard drive, 23-inch high-definition display
Supporting damped optical shockproof platform Table size length and width 600*600 *100 mm

Four-axis adjustable substrate carrier platform:

X/Y two-axis electric adjustable displacement slide table with stroke of 13 mm, positioning accuracy of 0.2 μm, maximum speed of two axes of 350 μm/s, minimum speed of 2 μm/s; motorized rotary table around z-axis, maximum moving speed ±20 °/s, minimum moving speed ±0.1°/s, positioning accuracy 0.1°, rotatable range ±90 °, both continuous rotation and single-step rotation, especially suitable for stacking double-layer twisted graphene and other needs Accurately control various types of twisted and misaligned heterojunction two-dimensional devices in the stacking direction; horizontal manual tilt angle is adjusted by 3~5 degrees.

The maximum temperature of the loading platform is 150 °C, the lowest temperature is 10 °C, the heating rate is up to 2 °C/s, the cooling speed is up to 1.5 °C/s, the lifting temperature can reach 0.01 °C/s, the oscillation deviation is less than 0.2 °C, stable. The deviation is less than 0.03 °C computer software or temperature control panel operation, display the temperature in real time and control the temperature rise and fall.

Four-axis adjustable slide mobile platform:

X/Y two-axis electric adjustable displacement slide table, stroke 25mm, positioning accuracy 0.2μm, maximum speed of two axes moving 350μm/s, minimum speed 2μm/s; Z-axis electric lifting slide, stroke 10mm, positioning accuracy 0.2μm, The maximum speed of electric displacement is 200μm/s, the minimum speed is 5μm/s; the speed is multi-speed optional, with continuous running function and single walking function, suitable for slow junction of heterojunction; manual rapid rotation sampling device.

Motorized microscope focusing Z axis:

Z-axis electric lifting slide for vacuum position, adjust the focus position of the objective lens in situ, easy to observe samples at different positions during the transfer process, stroke 10mm, positioning accuracy 0.2μm, maximum displacement of electric displacement 350 μm/s, minimum speed 10μm/ s.

All electric displacement slides of E1-Vac can be speed set and motion control through the joystick and computer software. The software can also rotate and transparent the photos, which greatly facilitates the search and accurate transfer of samples.

Ultra-low vacuum environment, vacuuming within 30 min, vacuum value as low as 5 Pa, effectively avoiding the generation of bubbles during transfer, and can produce high quality heterojunction. The vacuum chamber has a viewing window design, and the backlight has a backlight design to facilitate the observation of the sample state from the outside under vacuum conditions.

The microscopic observation system uses a continuously adjustable zoom single-tube microscope, using a coaxial illumination source, equipped with a 20x ultra-long working distance objective lens, a 12-megapixel USB3.0 ultra-high-definition CMOS microscopy camera, and a comprehensive magnification of up to 3500 times ( Similar to metallographic microscopy system 45 times objective magnification effect). A hand-punched single-layer graphene sample on a silicon wafer can be clearly displayed. Provides micro camera operation software for photo shooting, recording video, measuring sample size, and split screen comparison.