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Surface morphology observation

Electron microanalysis is to analyze the micro region morphology, crystal structure and chemical composition of the sample material by using various physical signals generated by the interaction between the focused electron beam and the sample material.

The manufacture of SEM is based on the interaction between electron and matter. When a high-energy incident electron bombards the surface of the material, the excited region will produce secondary electron, Auger electron, characteristic X-ray and continuous spectrum X-ray, backscatter electron, transmission electron, and electromagnetic radiation in the visible, ultraviolet and infrared light regions. At the same time, it can also produce electron hole pair, lattice vibration (phonon), electron vibration (plasma). In principle, by using the interaction of electrons and matter, we can obtain the information of various physical and chemical properties of the sample itself, such as morphology, composition, crystal structure, electronic structure, internal electric field or magnetic field, etc.

According to the mechanism of different information, different information detectors are used to realize the selective detection. For example, collecting the secondary electron and backscattered electron can get the information about the micro morphology of the substance, and collecting the X-ray can get the information about the chemical composition of the substance.