Material testing and consumables Material testing and consumables> Silicon nitride film

产品:TEM silicon nitride film single pane

Detailed

The TEM silicon nitride film pane produced by Beike Nano is produced by advanced microelectronics technology and can be used for high-resolution electron microscopy observation of micro-nano samples. This pane is an octagon with a 3mm outer diameter and is suitable for all TEM sample rods. To be suitable for a variety of experimental conditions, Beike Nano provides scientific researchers with single pane, multi pane and micropore pane standard product. The silicon nitride film adopts low-stress technology (<250MPa). The silicon nitride film is thin and not easily damaged. It is very suitable for cutting-edge research in biology, materials, physics, and chemistry.

Features


Ultra clean

Class 100 clean environment

Strict selection of silicon substrate materials

Advanced technology level

high strength

Film stress <250Mpa

The thinnest film can reach 10nm

The window size can be up to 2cm

Super smooth

Roughness less than 0.5nm

Uniformity is better than 5%

Excellent physical and chemical stability

Acid resistance (except hydrofluoric acid), alkali resistance, organic solvent resistance

Easy to use plasma cleaning


High current electron beam tolerance



Technical Parameters

Outer frame items parameter Outer frame items parameter
material N -type silicon Resistivity 1 ~ 10 Ω-cm
Silicon nitride film parameters parameter Silicon nitride film parameters parameter
material LPCVD silicon nitride film stress <250MPa
Dielectric constant 6-7 Dielectric strength 10 (10 6 V / cm)
Resistivity 10 16 Ω-cm Roughness (Ra) 0.28 ± 5% nm
Young‘s modulus 270GPa Roughness (Rms) 0.40 ± 5% nm

Application range

Nano materials, semiconductor materials, optical crystal materials, functional thin film materials

Characterization experiments of colloids, aerogels, organic materials and nanoparticles

Analysis of carbon-containing samples (photoresist, polymer, food, oil, fuel, etc.)

As a biological and cellular carrier

Product specification

- the TEM single-pane silicon nitride film -

Substrate 200um thick, 3mm diameter standard TEM silicon nitride window
Product ID Film thickness Window size Buy now
SG010Z 10nm 0.10 × 0.10mm
SG015Z 10nm 0.15 × 0.15mm
SG025Z 10nm 0.25 × 0.25mm
SG050Z 10nm 0.50 × 0.50mm
SG025A 15nm 0.25x0.25mm
SG050A 15nm 0.5x0.5mm
SG100A 15nm 1x1mm
SG025B 30nm 0.25x0.25mm
SG050B 30nm 0.5x0.5mm
SG100B 30nm 1x1mm
SG025C 50nm 0.25x0.25mm
SG050C 50nm 0.5x0.5mm
SG100C 50nm 1x1mm
SG050D 100nm 0.5x0.5mm
SG025E 200nm 0.25x0.25mm
SG050E 200nm 0.5x0.5mm
Each box contains 10 chips

- TEM multi-pane silicon nitride film -

Multi-window array, substrate 200um thick, 3mm diameter standard TEM silicon nitride pane
Product ID Film thickness Window size Number of windows Window pitch
AR010Z 10nm 0.1x0.1mm 9 0.35nm
AR010A 15nm 0.1x0.1mm 9 0.35mm
AR010B 30nm 0.1x0.1mm 9 0.35mm
AR010C 50nm 0.1x0.1mm 9 0.45mm
TA015A 15nm 0.1x1.5mm 2 0.45mm
TA015C 50nm 0.1x1.5mm 2 0.45mm
Each box contains 10 chips

- the TEM microporous silicon nitride film -

Micro-hole array, substrate 200um thick, 3mm diameter standard TEM silicon nitride pane
Product ID Film thickness Window size Aperture Array Hole spacing
ME050B 30nm 0.5x0.5mm 2.8μm 45x45 10μm
ME050C 50nm 0.5x0.5mm 2.0μm 45x45 10μm
ME050C10 50nm 0.5x0.5mm 10μm 32x32 15μm
ME050E05 200nm 0.5x0.5mm 5μm 49x49 10μm
Each box contains 10 chips

—— TEM nanoporous silicon nitride film ——

Micro-hole array, substrate 200um thick, 3mm diameter standard TEM silicon nitride pane
Product ID Film thickness Window size Aperture Array Hole spacing
NE005C10 50nm 50 × 50μm 1.0μm 15x15 2.0um
NE050C10 50nm 0.5x0.5mm 1.0μm 15x15x4 5.0μm
NE005E10 200nm 50 × 50μm 1.0μm 15x15 2.0μm
NE050E10 200nm 0.5x0.5mm 1.0μm 15x15x4 5.0μm
Each box contains 10 chips


Warm tip: the products supplied by Beijing Beike Xincai Technology Co., Ltd. are only used for scientific research, not for human body


Item ID Info
BK2020040440-07 CAS：
ID：BK2020040440
Pack：SG010Z
Parameter：0.10×0.10mm
Stock：100
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Price：$0
BK2020040440-08 CAS：
ID：BK2020040440
Pack：SG015Z
Parameter：0.15×0.15mm
Stock：100
Make up：
Price：$0
BK2020040440-09 CAS：
ID：BK2020040440
Pack：SG025Z
Parameter：0.25×0.25mm
Stock：100
Make up：
Price：$0
BK2020040440-10 CAS：
ID：BK2020040440
Pack：SG050Z
Parameter：0.50×0.50mm
Stock：100
Make up：
Price：$0
BK2020040440-11 CAS：
ID：BK2020040440
Pack：SG025A
Parameter：0.25x0.25mm
Stock：100
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Price：$0
BK2020040440-12 CAS：
ID：BK2020040440
Pack：SG050A
Parameter：0.5x0.5mm
Stock：100
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Price：$0
BK2020040440-13 CAS：
ID：BK2020040440
Pack：SG100A
Parameter：1x1mm
Stock：100
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Price：$0
BK2020040440-14 CAS：
ID：BK2020040440
Pack：SG025B
Parameter：0.25x0.25mm
Stock：100
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BK2020040440-15 CAS：
ID：BK2020040440
Pack：SG050B
Parameter：0.5x0.5mm
Stock：100
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BK2020040440-16 CAS：
ID：BK2020040440
Pack：SG100B
Parameter：1x1mm
Stock：100
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BK2020040440-17 CAS：
ID：BK2020040440
Pack：SG025C
Parameter：0.25x0.25mm
Stock：100
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BK2020040440-18 CAS：
ID：BK2020040440
Pack：SG050C
Parameter：0.5x0.5mm
Stock：100
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BK2020040440-19 CAS：
ID：BK2020040440
Pack：SG100C
Parameter：1x1mm
Stock：100
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BK2020040440-20 CAS：
ID：BK2020040440
Pack：SG050D
Parameter：0.5x0.5mm
Stock：100
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BK2020040440-21 CAS：
ID：BK2020040440
Pack：SG025E
Parameter：0.25x0.25mm
Stock：100
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Price：$0
BK2020040440-22 CAS：
ID：BK2020040440
Pack：SG050E
Parameter：0.5x0.5mm
Stock：100
Make up：
Price：$0
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