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TEM multi-pane silicon nitride film

202052917738368.pdf





ID:BK2020040423
CAS:
price: $480
Item ID:BK2020040423-06
specification:
Detailed

The TEM silicon nitride film pane produced by Beike Nano is produced by advanced microelectronics technology and can be used for high-resolution electron microscopy observation of micro-nano samples. This pane is an octagon with a 3mm outer diameter and is suitable for all TEM sample rods. To be suitable for a variety of experimental conditions, Beike Nano provides scientific researchers with single pane, multi pane and micropore pane standard product. The silicon nitride film adopts low-stress technology (<250MPa). The silicon nitride film is thin and not easily damaged. It is very suitable for cutting-edge research in biology, materials, physics, and chemistry.

Features



Ultra clean

Class 100 clean environment

Strict selection of silicon substrate materials

Advanced technology level

high strength

Film stress <250Mpa

The thinnest film can reach 10nm

The window size can be up to 2cm

Super smooth

Roughness less than 0.5nm

Uniformity is better than 5%

Excellent physical and chemical stability

Acid resistance (except hydrofluoric acid), alkali resistance, organic solvent resistance

Easy to use plasma cleaning


High current electron beam tolerance



Technical Parameters


Outer frame items parameter Outer frame items parameter
material N -type silicon Resistivity 1 ~ 10 Ω-cm
Silicon nitride film parameters parameter Silicon nitride film parameters parameter
material LPCVD silicon nitride film stress <250MPa
Dielectric constant 6-7 Dielectric strength 10 (10 6 V / cm)
Resistivity 10 16 Ω-cm Roughness (Ra) 0.28 ± 5% nm
Young‘s modulus 270GPa Roughness (Rms) 0.40 ± 5% nm

Application range


Nano materials, semiconductor materials, optical crystal materials, functional thin film materials

Characterization experiments of colloids, aerogels, organic materials and nanoparticles

Analysis of carbon-containing samples (photoresist, polymer, food, oil, fuel, etc.)

As a biological and cellular carrier

Product specification


- the TEM single-pane silicon nitride film -

Substrate 200um thick, 3mm diameter standard TEM silicon nitride window
Product ID Film thickness Window size Buy now
SG010Z 10nm 0.10 × 0.10mm
SG015Z 10nm 0.15 × 0.15mm
SG025Z 10nm 0.25 × 0.25mm
SG050Z 10nm 0.50 × 0.50mm
SG025A 15nm 0.25x0.25mm
SG050A 15nm 0.5x0.5mm
SG100A 15nm 1x1mm
SG025B 30nm 0.25x0.25mm
SG050B 30nm 0.5x0.5mm
SG100B 30nm 1x1mm
SG025C 50nm 0.25x0.25mm
SG050C 50nm 0.5x0.5mm
SG100C 50nm 1x1mm
SG050D 100nm 0.5x0.5mm
SG025E 200nm 0.25x0.25mm
SG050E 200nm 0.5x0.5mm
Each box contains 10 chips

- TEM multi-pane silicon nitride film -

Multi-window array, substrate 200um thick, 3mm diameter standard TEM silicon nitride pane
Product ID Film thickness Window size Number of windows Window pitch
AR010Z 10nm 0.1x0.1mm 9 0.35nm
AR010A 15nm 0.1x0.1mm 9 0.35mm
AR010B 30nm 0.1x0.1mm 9 0.35mm
AR010C 50nm 0.1x0.1mm 9 0.45mm
TA015A 15nm 0.1x1.5mm 2 0.45mm
TA015C 50nm 0.1x1.5mm 2 0.45mm
Each box contains 10 chips

- the TEM microporous silicon nitride film -

Micro-hole array, substrate 200um thick, 3mm diameter standard TEM silicon nitride pane
Product ID Film thickness Window size Aperture Array Hole spacing
ME050B 30nm 0.5x0.5mm 2.8μm 45x45 10μm
ME050C 50nm 0.5x0.5mm 2.0μm 45x45 10μm
ME050C10 50nm 0.5x0.5mm 10μm 32x32 15μm
ME050E05 200nm 0.5x0.5mm 5μm 49x49 10μm
Each box contains 10 chips

—— TEM nanoporous silicon nitride film ——

Micro-hole array, substrate 200um thick, 3mm diameter standard TEM silicon nitride pane
Product ID Film thickness Window size Aperture Array Hole spacing
NE005C10 50nm 50 × 50μm 1.0μm 15x15 2.0um
NE050C10 50nm 0.5x0.5mm 1.0μm 15x15x4 5.0μm
NE005E10 200nm 50 × 50μm 1.0μm 15x15 2.0μm
NE050E10 200nm 0.5x0.5mm 1.0μm 15x15x4 5.0μm
Each box contains 10 chips


Warm tip: the products supplied by Beijing Beike Xincai Technology Co., Ltd. are only used for scientific research, not for human body

Item ID CAS ID Pack Parameter Stock Make up Price
BK2020040423-01 BK2020040423 AR010Z 0.1x0.1mm 100 $720
BK2020040423-02 BK2020040423 AR010A 0.1x0.1mm 100 $680
BK2020040423-03 BK2020040423 AR010B 0.1x0.1mm 100 $600
BK2020040423-04 BK2020040423 AR010C 0.1x0.1mm 100 $520
BK2020040423-05 BK2020040423 TA015A 0.1x1.5mm 100 $640
BK2020040423-06 BK2020040423 TA015C 0.1x1.5mm 100 $480
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